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Semiconductor silicon 1990 : proceedings of the Sixth International Symposium on Silicon Materials Science and Technology

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索取号：TN304.1-53/E801/6
作者：International Symposium on Silicon Materials Science and Technology (6th : 1990 : Montréal、 Québec)、Huff、 Howard R.、Barraclough、 Keith G.、Chikawa、 J. (Junichi)、 1930-、Electrochemical Society. Electronics Division.、Electrochemical Society. Dielectrics and Insulation Division.、
出版社：Pennington, NJ : Electrochemical Society, c1990.