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ULSI science and technology/1987 : proceedings of the First International Symposium on Ultra Large Scale Integration Science and Technology

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索取号：TN47/E9011
作者：International Symposium on Ultra Large Scale Integration Science and Technology (1st : 1987 : Philadelphia、 Pa.)、Broydo、 S.、Osburn、 C. M.、Electrochemical Society. Electronics Division.、Electrochemical Society. Dielectrics and Insulation Division.、
出版社：Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, 1987.