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Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982

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索取号：O46-51/E901
作者：Ion Implantation School (1982 : Berchtesgaden、 Germany)、Ryssel、 Heiner、 1941-、Glawischnig、 H. (Hans)、 1939-、International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden、 Germany)、
出版社：Berlin ; New York : Springer-Verlag, 1982.