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名称 Fundamental aspects of ultrathin dielectrics on Si-based devices
索引号 TN304.1-532/E991
分类号 TN304.1-532
TN304.1(元素半导体)
TN304(材料)
TN30(一般性问题)
TN3(半导体技术)
TN(无线电电子学、电信技术)
T(工业技术)
作者
出版社 Dordrecht ; Boston : Kluwer Academic Publishers, c1998.
ISBN
页数 x, 507 p. : ill. ; 25 cm.
价格
标签
简介
注解 "Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8,1997"--T.p. verso. "Published in cooperation with NATO Scientific Affairs Division." 附註 Includes bibliographical references and index.